Semiconductor
Wafer inspection machine
Device parameters:
· Capacity: ≥ 8ppm;
· Accuracy rate: ≥ 95%;
· Utilization rate: ≥ 95% (caused only by the equipment itself);
· Missing detection rate: 0;
· False detection rate: ≤ 5%;
Installation environment requirements:
· Power requirement: 380VAC, 50Hz ≤40KW;
· Compressed air source: 0.4~0.7MPa ≤1000L/H;
· Ambient temperature: room temperature +10°~+45°;
· Relative humidity: ≯50%, no condensation, no corrosive, flammable gas.
